Mass Spectrometers for Material Science
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Energy Analyzer with Sampling Cone in SIMS System |
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SIMS and TPD |
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Desorption |
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Outgassing Studies |
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Scattering |
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Molecular Beam |
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Plasma Analysis |
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MBE Reflected Products and Beam Analysis |
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CID and SID |
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Extrel CMS builds a range of standard and custom systems and components for research and industrial material science. These include:
Add-on QMS - Full Quadrupole Mass Spectrometers that you bolt on to existing systems to add high sensitivity, high resolution analytical capability. Add SIMS to your multi-technique UHV system complete with energy analysis that has 0.6 eV energy resolution.
Components - A full range of high performance Quadrupole Mass Spectrometry Components that you can use to build your own material science system or to improve the performance of an existing system. Extend the mass range of your current system or improve its sensitivity by an order of magnitude or more by adding our high transmission quadrupoles mass filters and a rock solid RF supplies to it.
Plasma Monitoring Systems - Understand and improve your PECVD or Etch process by adding our plasma analysis ms modules to your system.
Molecular Beam Systems - Standard and custom Molecular Beam Systems for a wide range of applications.
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