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Plasma Monitoring and Molecular Beam Systems
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Features
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Accurate Process Sampling |
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High Signal to Noise / Sensitivity |
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Energy Analysis |
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Stable Operation |
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Longer Analyzer Life |
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Small Footprint, Flexible Design |
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Sample from up to Atmospheric Pressure |
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Two and Three Stage Designs |
Applications
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Plasma Etch and Deposition |
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Chemical Vapor Deposition |
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Clusters and Nanoparticle Research |
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Combustion Studies |
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Atmospheric Research |
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Flow Tube/Drift Cell Detection |
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Electrospray Detection |
System Details |

For more details ask for Product Notes GP-101, and GP-102and Application Note GA-203 or Contact your local Extrel Representative.
Specials and Custom Systems
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Custom Chambers |
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Analytical System Upgrades |
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Sampling Systems |
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MS/MS Systems |
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Multi-Techniques Systems |
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Custom Gas Analysis Systems |
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Drift Cell/Flow Tube Systems |
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Cluster Analysis / Deposition Systems |
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Biomolecule Analysis / Deposition Systems |
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Surface Science Systems | |
Extrel CMS has been building custom systems for a wide range of research and industrial applications for over 30 years. For a complete list of our capabilities please contact your local Extrel Representative. |
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