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Energy Filters
Flanges and Detection
Gas Inlets
How a Quadrupole MS Works
Ionizers and Ion Optics
Plasma Monitoring / Molecular Beam Systems
Process Mass Spectrometers
Product Note List
Quadrupole Mass Filters
Quadrupole Mass Spectrometer Components and Systems
Quadrupole Mass Spectrometers Flange Mounted
RF/DC and RF-only Power Supplies
Software and Controllers
Thermal Desorption System
What’s New
Residual Gas Analyzers, RGA

Plasma Monitoring / Molecular Beam Systems


Plasma Monitoring and Molecular Beam Systems

 
Features
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Accurate Process Sampling
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High Signal to Noise / Sensitivity
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Energy Analysis
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Stable Operation
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Longer Analyzer Life
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Small Footprint, Flexible Design
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Sample from up to Atmospheric Pressure
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Two and Three Stage Designs

Applications
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Plasma Etch and Deposition
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Chemical Vapor Deposition
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Clusters and Nanoparticle Research
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Combustion Studies
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Atmospheric Research
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Flow Tube/Drift Cell Detection
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Electrospray Detection

System Details

 

For more details ask for Product Notes  GP-101, and  GP-102and Application Note GA-203 or Contact your local Extrel Representative.


Specials and Custom Systems

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Custom Chambers
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Analytical System Upgrades
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Sampling Systems
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MS/MS Systems
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Multi-Techniques Systems
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Custom Gas Analysis Systems
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Drift Cell/Flow Tube Systems
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Cluster Analysis / Deposition Systems
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Biomolecule Analysis / Deposition Systems
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Surface Science Systems

Extrel CMS has been building custom systems for a wide range of research and industrial applications for over 30 years. For a complete list of our capabilities please contact your local Extrel Representative.