Partial Pressure Detection limits of 10-16 Torr Mass Ranges of  1-60, 1-300, 1-500, 1-1000 amu 500o C Maximum Temperature Temperature Gradient across the wafer > 2% Cooling lines for rapid cool down High Precision PID Controller for Temperture Ramp Can hold up to 12 inch wafers
TDS System	Extrel's thermal desorption systems offer high sensitivity analysis with precise temperature control.  We have both full TDS / TDA systems and flange mounted instrument that can be added to existing instruments. We offer both standard and custom systems.