Mass Spectrometers and Residual Gas Analyzers for Semiconductor Process Monitoring, Quality Control, Material Analysis and Environmental Monitoring
Since the 1960s Extrel CMS has provided instruments for a wide range of Semiconductor Manufacturing and R & D applications. We cover the process from beginning to end starting with QA/QC monitoring of incoming Bulk and UHP gases, go on to Process Monitoring and Control, continue with Exhaust Monitoring and Environmental Analysis and finish up with Material Analysis of the final product.
Bulk and UHP Gas Analysis, Gas Purification System Monitoring
We have a range of Gas Analysis Systems to do impurity analysis in bulk gases, specialty and UHP gas and HAPS. These range from simple RGAs system with 10 ppm detection limits for Quality control of bulk gases to APIMS systems with < 10 ppt detection limits for monitoring trace impurities in UHP gases.
Plasma Etch and CVD Process Analysis
Our Mass Spectrometers High Sensitivity and Resolution, Fast, Accurate and Stable Response and Versatility make them ideal for monitoring energetic processes such as Plasma Etching and Chemical Vapor Deposition. Depending on the mass range and sampling system options chosen, our instruments can provide the following performance:
Positive and Negative Ion, Radical and Neutral Detection
- Partial Pressure Detection as low as 10-16 Torr
- Ion Energy Analysis to +/- 100 volts
- Energy Resolution as low 0.5 eV
- Monitor up to 20 Masses or Mass Ranges
- Sample processes from UHV to atmospheric pressure
- Resistance to corrosive and high particulate environments
MBE
Our Sensitivity, Fast Response Times and Various System Configurations allows you to monitor the beam composition, products reflected from the surface or both.
Exhaust Gas Analysis and Scrubber Performance Monitoring
As the global environment laws become increasing strict, having a Sensitive, Reliable and Repeatable environmental monitoring system becomes more important. Extrel's instruments have proven their worth to both large and small Semiconductor and Gas companies for more than three decades.
TPD, SIMS and Outgassing Studies
Extrel has long been known for providing the highest Sensitivity Instruments for material analysis. We have been one of the leaders in Temperature Programmed Desorption (TPD), Secondary Ion Mass Spectrometry (SIMS) and Outgassing Studies.
If you would like more information any of our Semiconductor products please go to our Information Request page or contact you local Extrel Sales Representative
