Residual Gas Analyzers (RGA), used to identify gases that are present in vacuum environments, operate in research laboratories and industrial processing facilities worldwide.

Extrel’s Residual Gas Analyzers and Mass Spectrometers are used to:

• Look for contaminants in semiconductor processing systems
• Search for gases desorbing off of the walls of ultra high vacuum (UHV) chambers
• Product characterization
• Monitor the headspace of fermentors
• Check for possible leaks in vacuum furnaces

Extrel MAX Systems offer high sensitivity and resolution, and provide a variety of mass ranges to fit your needs. Our MAX300 Series is capable of detection limits of 10 parts per billion (ppb) to 100%, with unmatched accuracy and repeatability while sampling from atmospheric pressure.

Extrel’s product line for Gas Analysis applications include:

• Extrel Residual Gas Analyzers - (GP-114)
• MAX Flange Mounted MS Systems - (GP-110)
• MAX-LT™ Flange Mounted Mass Spectrometers - (GP-112)
• MAX300-LG™ Gas Analysis System - (GP-210)
• MAX300-IG™ Gas Analysis System - (GP-212)

Specifications of the MAX Series include:

• High Sensitivity to 6 mA/Torr
• High Resolution to 110 M at m/z 28
• Detection Limits from 10 ppb to 100%
• Partial Pressure Detectability to 10^-16 mbar
• Various Mass Ranges from 2-250 up to 2-1000 amu
• Positive and Negative Ion Detection
• Corrosive and Hazardous Gas Packages

For additional specifications and benefits of the Extrel MAX300-IG Industrial Gas Analyzer and the MAX300-LG Laboratory Gas Analyzer, please view our product guide or contact your local Sales Representative.