Analysis of Molecular Beam Epitaxy (MBE) requires the use of a Mass Spectrometer with very high sensitivity and low noise electronics to monitor not only the low flux rate of multiple molecular beams but also to perform Ultra High Vacuum (UHV) Residual Gas Analysis of the chamber.

Extrel MAX and MAX-LT™ Flange Mounted Mass Spectrometers meet both requirements of high sensitivity and low noise electronics. These systems can provide partial pressure detection down to 10^-16 mbar, and allow the user to visually see signals as low as 3 counts per second.

Extrel’s MAX Product Line for Molecular Beam Epitaxy includes:

• Cross Beam Deflector Ionizer
• MAX Flange Mounted Mass Spectrometers - (GP-110)
• MAX-LT Flange Mounted Mass Spectrometers - (GP-112)

The MAX and MAX-LT Flange Mounted Mass Spectrometers measure:

• High Sensitivity to 6 mA/Torr
• High Resolution to 110 M at m/z 28
• Partial Pressure Detectability to 10^-16 mbar
• Low Signal Measurement of < 3 cps
• High Abundance Sensitivity to 10⁷
• Various Mass Ranges from 1-60 to 2-2000 amu
• Axial and right angle configurations
• Positive and Negative Ion, and Neutral Detection

For more information related to MBE see the following:

• Appearance Potentials - (GA-630)
• Using Quadrupoles with High Voltage Ion Sources - (SA-550)

For additional specifications and benefits of the Extrel MAX and MAX-LT Systems and available Components, please view our product guide or contact your local Sales Representative.