Mass spectrometry has long been a key technique in the development and production of semiconductors. The Semiconductor market requires:

• The use of high purity materials
• Tight control of the process
• Use of an analysis and control system with high sensitivity and resolution to adapt to chemistry changes
• High stability and repeatability of analytical techniques

In addition, strict enforcement of environmental standards has put demands on Semiconductor producers to better control emissions. For example, greenhouse and hazardous gas emission controls have tightened.

To maximize yields, reduce costs and increase the return on investment, Semiconductor manufacturing plants rely on Extrel’s MAX Quadrupole Mass Spectrometers and Gas Analysis Systems for various applications such as:

Process Analysis and Control:

• Plasma and Chemical Vapor Deposition (CVD) analysis systems for Etch, CVD and Plasma-Enhanced Chemical Vapor Deposition (PECVD)
• Analyzers for Laser Ablation, Molecular Beam Epitaxy (MBE) and Lithography

Research and Finished Device Quality Control:

• Material Analysis Systems for Secondary Ion Mass Spectrometry (SIMS), Temperature Programmed Desorption (TPD) and Outgassing Studies

Quality Control and Emissions Monitoring:

• Gas Analysis Systems for incoming ultra high purity gas (UHP) and emission monitoring such as Scrubber / Burn Box Efficiency

Extrel’s MAX Series Specifications include:

High Sensitivity:

• Ability to measure smaller and smaller changes in the chemical composition of the production processes
• Ability to detect lower levels of contaminants in incoming materials such as UHP gases
• Ability to detect very small imperfections on completed devices
• Ability to detect lower levels of greenhouse and hazardous gases in emissions

High Resolution:

• Gives the user the ability to analyze ever more complex chemistries

High Stability/Repeatability:

• Allows measurements to be repeated accurately over time to pinpoint small changes in the process and/or in the materials

Flexibility:

• Systems adapt as the chemistry, processes, and environmental requirements change

Extrel has been manufacturing Mass Spectrometers for over 45 years. We work closely with our customers to understand their obstacles involving semiconductor applications. Our expertise in developing the specific products our customers need has established our reputation as the world’s leading supplier of Gas Analysis Systems, Mass Spectrometers and Components.

For additional specifications and benefits of the Extrel MAX and MAX-LT™ Systems and available Components, please view our product guide or contact your local Sales Representative.