Applications - Semiconductor

MBE Monitoring

Analysis of Molecular Beam Epitaxy (MBE) requires the use of a Mass Spectrometer with very high sensitivity and low noise electronics to monitor not only the low flux rate of multiple molecular beams but also to perform Ultra High Vacuum (UHV) Residual Gas Analysis of the chamber.

Extrel MAX and MAX-LT™ Flange Mounted Mass Spectrometers meet both requirements of high sensitivity and low noise electronics. These systems can provide partial pressure detection down to 10-16 mbar, and allow the user to visually see signals as low as 3 counts per second.

The VeraSpec MBMS also presents an attractive turn-key system that can be connected to the MBE chamber.

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Extrel’s MAX Product Line for Molecular Beam Epitaxy includes:

  • Cross Beam Deflector Ionizer
  • MAX Flange Mounted Mass Spectrometers
  • MAX-LT Flange Mounted Mass Spectrometers
  • VeraSpec MBMS Systems

For more information related to MBE see the following:

  • Appearance Potentials
  • Using Quadrupoles with High Voltage Ion Sources
 The MAX and MAX-LT Flange Mounted Mass Spectrometers measure:
  • High Sensitivity to 6 mA/Torr
  • High Resolution to 110 M at m/z 28
  • Partial Pressure Detectability to 10-16 mbar
  • Low Signal Measurement of < 3 cps
  • High Abundance Sensitivity to 107
  • Various Mass Ranges from 1-60 to 2-2000 amu
  • Axial and right angle configurations
  • Positive and Negative Ion, and Neutral Detection

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